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Journal description
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Details for article 55 of 120 found articles
| Title: |
Influence of coating thickness on the microstructure, composition and optical properties of aluminum nitride thin films grown on silicon substrates via low-temperature PEALD |
| Author: |
Ambartsumov, M.G. Tarala, V.A. Nikova, M.S. Krandievsky, S.O. Kozhitov, L.V. |
| Appeared in: |
Surfaces and interfaces |
| Paging: | Volume 27 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 55 of 120 found articles
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