Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing
Titel:
Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing
Auteur:
Frechilla, Alejandro Napari, Mari Strkalj, Nives Barriuso, Eduardo Niang, Kham Hellenbrand, Markus Strichovanec, Pavel Simanjuntak, Firman Mangasa Antorrena, Guillermo Flewitt, Andrew Magén, César de la Fuente, Germán F. MacManus-Driscoll, Judith L. Angurel, Luis Alberto Pardo, José Ángel