|
Scheduling and Control of a Wafer Transfer Robot for Foundry Equipment Innovation Competition |
|
|
|
Titel: |
Scheduling and Control of a Wafer Transfer Robot for Foundry Equipment Innovation Competition |
Auteur: |
Song, Kai-Tai Ou, Song-Qing Yang, Cheng-An Sun, Yu-Xuan Kang, Li-Ren Wang, Zhen-Yu Wang, Yu-Shin Lu, Pei-Chun Ko, Chun-Long Chen, Yao Hsiang |
Verschenen in: |
IFAC-PapersOnLine |
Paginering: |
Jaargang 52 () nr. 15 pagina's 627-632 |
Jaar: |
2019 |
Inhoud: |
|
Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|