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Patterning of metal acetylacetonate complex via extreme-ultraviolet light-induced chemical reaction and straightforward thermal development process |
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Title: |
Patterning of metal acetylacetonate complex via extreme-ultraviolet light-induced chemical reaction and straightforward thermal development process |
Author: |
Byeon, Jinhwan Kim, Dowon Kim, Sangjin Ahn, Jaeboong Oh, Dong Suk Yoon, Yang Hun Jee, Hae-geun Kim, Yejoon Hwang, Chan-Cuk Hong, Sukwon |
Appeared in: |
Materials today chemistry |
Paging: |
Volume 43 () nr. C pages p. |
Year: |
2025 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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