Absence of synergistic effects in quasi-simultaneous sputtering of tungsten by Ar and D ions
Titel:
Absence of synergistic effects in quasi-simultaneous sputtering of tungsten by Ar and D ions
Auteur:
Cupak, C. Brandstätter, F. Cserveny, R. Troneberger, F. Biber, H. Fellinger, M. Redl, A. Moro, M.V. Böhm, D. Eisenmenger-Sittner, Ch. Mutzke, A. Primetzhofer, D. Aumayr, F.