Surface roughness effect on Mo physical sputtering and re-deposition in the linear plasma device PSI-2 predicted by ERO2.0
Titel:
Surface roughness effect on Mo physical sputtering and re-deposition in the linear plasma device PSI-2 predicted by ERO2.0
Auteur:
Eksaeva, A. Borodin, D. Romazanov, J. Kirschner, A. Kreter, A. Eichler, M. Rasinski, M. Pospieszczyk, A. Unterberg, B. Brezinsek, S. Linsmeier, Ch. Tskhakaya, D. Borodkina, I. Komm, M.