Influence of heavier impurity deposition on surface morphology development and sputtering behavior explored in multiple linear plasma devices
Titel:
Influence of heavier impurity deposition on surface morphology development and sputtering behavior explored in multiple linear plasma devices
Auteur:
Nishijima, D. Kreter, A. Baldwin, M.J. Borodin, D. Eksaeva, A. Hwangbo, D. Kajita, S. Miyamoto, M. Ohno, N. Patino, M. Pospieszczyk, A. Rasinski, M. Schlummer, T. Terra, A. Doerner, R.P.