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Heteroepitaxial growth of β-Ga2O3 thin films on c-plane sapphire substrates with β-(AlxGa1-x)2O3 intermediate buffer layer by mist-CVD method |
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Title: |
Heteroepitaxial growth of β-Ga2O3 thin films on c-plane sapphire substrates with β-(AlxGa1-x)2O3 intermediate buffer layer by mist-CVD method |
Author: |
Cheng, Yaolin Zhang, Chunfu Xu, Yu Li, Zhe Chen, Dazheng Zhu, Weidong Feng, Qian Xu, Shengrui Zhang, Jincheng Hao, Yue |
Appeared in: |
Materials today communications |
Paging: |
Volume 29 () nr. C pages p. |
Year: |
2021 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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