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Details for article 20 of 29 found articles
| Title: |
Numerical modeling of atomic layer deposition supercycles |
| Author: |
Kunene, T.J. Coetzee, R.A.M. Tartibu, L. Jen, T.C. |
| Appeared in: |
Materials today: proceedings |
| Paging: | Volume 62 () nr. S1 pages S30-S39 |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 20 of 29 found articles
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