Point and extended defect interaction in low – high energy phosphorus implantation sequences
Titel:
Point and extended defect interaction in low – high energy phosphorus implantation sequences
Auteur:
Mica, I. Polignano, M.L. Bacciaglia, P. Brazzelli, D. Cseh, D. Galbiati, A. Grasso, S. Juhel, M. Kiss, Z.T. Monge Roffarello, P. Tomezzoli, E. Torti, A.M.