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Details for article 12 of 14 found articles
| Title: |
Structural, optical, and interface properties of sputtered AlN thin films under different hydrogen dilution conditions |
| Author: |
Montañez, L Töfflinger, J.A. Grieseler, R. Fischer, P. Ben-Or, A. Guerra, J.A. Weingärtner, R. Osten, H.J. Kribus, A. |
| Appeared in: |
Materials today: proceedings |
| Paging: | Volume 5 (2018) nr. 6P3 pages 14765-14771 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 14 found articles
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