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Details for article 27 of 34 found articles
| Title: |
Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering |
| Author: |
Phae-ngam, Wuttichai Lertvanithphol, Tossaporn Chananonnawathorn, Chanunthorn Kowong, Rattanachai Horprathum, Mati Meksuk, Sainampeung Waikhamnuan, Nat Thonglem, Sutatip |
| Appeared in: |
Materials today: proceedings |
| Paging: | Volume 47 () nr. P12 pages 3468-3470 |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 27 of 34 found articles
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