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Details for article 14 of 42 found articles
| Title: |
Effect of ALD window on thermal ALD deposited HfOx/Si interface for silicon surface passivation |
| Author: |
Tomer, Shweta Panigrahi, Jagannath Pathi, Prathap Gupta, Govind Vandana, |
| Appeared in: |
Materials today: proceedings |
| Paging: | Volume 46 () nr. P12 pages 5761-5765 |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 42 found articles
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