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Details for article 1 of 20 found articles
| Title: |
Atomic layer deposition for TiO2 and TiN nanometer films |
| Author: |
Insepov, Zeke Ainabayev, Ardak Bozheyev, Farabi Zhuldassov, Abat Lukasheva, Maria Tynyshtykbaev, Kurbangali B. |
| Appeared in: |
Materials today: proceedings |
| Paging: | Volume 4 (2017) nr. 11P2 pages 10 p. |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 20 found articles
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