Characterization of Si-DLC films synthesized by low cost plasma-enhanced chemical vapor deposition
Titel:
Characterization of Si-DLC films synthesized by low cost plasma-enhanced chemical vapor deposition
Auteur:
Salimon, Igor A. Temirov, Aleksandr A. Kubasov, Ilya V. Skryleva, Elena A. Kislyuk, Aleksandr M. Turutin, Andrei V. Kiselev, Dmitry A. Ilina, Tatyana S. Zhukov, Roman N. Statnik, Eugene S. Malinkovich, Mikhail D. Parkhomenko, Yuriy N.