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Journal description
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Details for article 33 of 89 found articles
| Title: |
ICP etching of SiC with low surface roughness |
| Author: |
Osipov, Artem A. Iankevich, Gleb A. Berezenko, Vladimir I. Speshilova, Anastasiya B. Alexandrov, Sergey E. |
| Appeared in: |
Materials today: proceedings |
| Paging: | Volume 30 () nr. P3 pages 512-515 |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 33 of 89 found articles
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