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                                       Details for article 33 of 89 found articles
 
 
  ICP etching of SiC with low surface roughness
 
 
Title: ICP etching of SiC with low surface roughness
Author: Osipov, Artem A.
Iankevich, Gleb A.
Berezenko, Vladimir I.
Speshilova, Anastasiya B.
Alexandrov, Sergey E.
Appeared in: Materials today: proceedings
Paging: Volume 30 () nr. P3 pages 512-515
Year: 2020
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 33 of 89 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands