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                                       Details for article 51 of 118 found articles
 
 
  Finite element analysis of polysilicon based MEMS temperature-pressure sensor
 
 
Title: Finite element analysis of polysilicon based MEMS temperature-pressure sensor
Author: Samridhi,
Singh, Kulwant
Alvi, P.A.
Appeared in: Materials today: proceedings
Paging: Volume 27 () nr. P1 pages 280-283
Year: 2020
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 51 of 118 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands