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Journal description
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Details for article 40 of 129 found articles
| Title: |
Electrochemical characterization of ruthenium dissolution and chemical mechanical polishing in hydrogen peroxide based slurries |
| Author: |
Yadav, Kavita Manivannan, R. Noyel Victoria, S. |
| Appeared in: |
Materials today: proceedings |
| Paging: | Volume 18 (2019) nr. P3 pages 1220-1228 |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 40 of 129 found articles
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