New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection
Titel:
New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection
Auteur:
Pelini, Jacopo Dello Russo, Stefano Lopez Garcia, Inaki Concetta Canino, Maria Roncaglia, Alberto Cancio Pastor, Pablo Galli, Iacopo Ren, Wei De Natale, Paolo Wang, Zhen Borri, Simone Siciliani de Cumis, Mario