Statistical analysis of vertically stacked nanosheet complementary FET based on polycrystalline silicon with multiple grain boundaries
Titel:
Statistical analysis of vertically stacked nanosheet complementary FET based on polycrystalline silicon with multiple grain boundaries
Auteur:
Park, Jin Ho Lee, Sang Ra Jeon, So Seok Kim, Min Ji Bae, Seung Woo Hong, Jeong San Yun, Gang Suk Koh, Won Jang, Jaewon Bae, Jin-Hyuk Jun Yoon, Young Man Kang, In