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Study on the damage evolution of 6H-SiC under different phosphorus ion implantation conditions and annealing temperatures |
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Titel: |
Study on the damage evolution of 6H-SiC under different phosphorus ion implantation conditions and annealing temperatures |
Auteur: |
Gu, Jin-Jun Zhao, Jin-Hua Bu, Ming-Yang Wang, Su-Mei Fan, Li Huang, Qing Li, Shuang Yue, Qing-Yang Wang, Xue-Lin Wei, Zhi-Xian Liu, Yong |
Verschenen in: |
Results in physics |
Paginering: |
Jaargang 43 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
The Authors |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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