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Details for article 21 of 47 found articles
| Title: |
Mechanical characterization of polysilicon cantilevers using a thermo-mechanical test chip fabricated with a combined bulk/surface micromachining technique |
| Author: |
Quiñones-N, F.J. De la Hidalga-W, F.J. Moreno, M. Molina, J. Zúñiga, C. Calleja, W. |
| Appeared in: |
Results in physics |
| Paging: | Volume 4 (2014) nr. C pages 2 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 47 found articles
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