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Metallic indium segregation control of InN thin films grown on Si(1 0 0) by plasma-enhanced atomic layer deposition |
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Titel: |
Metallic indium segregation control of InN thin films grown on Si(1 0 0) by plasma-enhanced atomic layer deposition |
Auteur: |
An, Yunlai He, Yingfeng Wei, Huiyun Liu, Sanjie Li, Meiling Song, Yimeng Qiu, Peng Rehman, Abdul Zheng, Xinhe Peng, Mingzeng |
Verschenen in: |
Results in physics |
Paginering: |
Jaargang 12 () nr. C pagina's 804-809 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
The Authors |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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