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                                       Details for article 104 of 116 found articles
 
 
  Silicon Surface Passivation by Al2O3: Effect of ALD Reactants
 
 
Title: Silicon Surface Passivation by Al2O3: Effect of ALD Reactants
Author: Repo, Päivikki
Talvitie, Heli
Li, Shuo
Skarp, Jarmo
Savin, Hele
Appeared in: Energy procedia
Paging: Volume 8 (2011) nr. C pages 7 p.
Year: 2011
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 104 of 116 found articles
 
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