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Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection |
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Titel: |
Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection |
Auteur: |
Zheng, Li Wang, Chong Cai, Deng'an Huang, Yunzhong Adi, Kegu Hong, Yan Chen, Yuanming Zhou, Guoyun Armini, Silvia De Gendt, Stefan Wang, Shouxu He, Wei |
Verschenen in: |
Journal of the Taiwan Institute of Chemical Engineers |
Paginering: |
Jaargang 112 () nr. C pagina's 130-136 |
Jaar: |
2020 |
Inhoud: |
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Uitgever: |
Taiwan Institute of Chemical Engineers |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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