|
Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification |
|
|
|
Titel: |
Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification |
Auteur: |
Yang, Zhiliang An, Kang Liu, Yuchen Guo, Zhijian Shao, Siwu Liu, Jinlong Wei, Junjun Chen, Liangxian Wu, Lishu Li, Chengming |
Verschenen in: |
International journal of minerals, metallurgy and materials |
Paginering: |
Jaargang 31 () nr. 10 pagina's 2287-2299 |
Jaar: |
2024-08-30 |
Inhoud: |
|
Uitgever: |
University of Science and Technology Beijing, Beijing |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|