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Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture |
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Titel: |
Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture |
Auteur: |
Wan, Ye Guo, Wenhui Xiao, Jin Yan, Dazhou Zhao, Xiong Guo, Shuhu Liu, Jianhua Zhong, Qifan Yang, Tao Zhao, Yu Chang, Xin Gao, Xin |
Verschenen in: |
Chinese journal of chemical engineering |
Paginering: |
Jaargang 28 () nr. 9 pagina's 2248-2255 |
Jaar: |
2020 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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