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Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture |
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Title: |
Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture |
Author: |
Wan, Ye Guo, Wenhui Xiao, Jin Yan, Dazhou Zhao, Xiong Guo, Shuhu Liu, Jianhua Zhong, Qifan Yang, Tao Zhao, Yu Chang, Xin Gao, Xin |
Appeared in: |
Chinese journal of chemical engineering |
Paging: |
Volume 28 () nr. 9 pages 2248-2255 |
Year: |
2020 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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