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Evaluation of surface integrity for ultra-precision machined fused silica surface based on atomic point-defect density |
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Titel: |
Evaluation of surface integrity for ultra-precision machined fused silica surface based on atomic point-defect density |
Auteur: |
Yang, Dinghuai Zhao, Linjie Cheng, Jian Liu, Qi Zhang, Zixiao Lei, Hongqin Yang, Zican Liu, Henan Wang, Jinghe Sun, Yazhou Chen, Mingjun |
Verschenen in: |
Journal of manufacturing processes |
Paginering: |
Jaargang 149 () nr. C pagina's 917-930 |
Jaar: |
2025 |
Inhoud: |
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Uitgever: |
The Society of Manufacturing Engineers |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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