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Atomistic mechanisms of SiC electrochemical mechanical polishing in aqueous H2O2: A ReaxFF molecular dynamics study |
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Titel: |
Atomistic mechanisms of SiC electrochemical mechanical polishing in aqueous H2O2: A ReaxFF molecular dynamics study |
Auteur: |
Zhu, Rui Zhang, Tianyu Yao, Qingyu Peng, Yang Cheng, Feng Wang, Zirui Wang, Yongguang Lu, Xiaolong Wang, Chuanyang Zhao, Yongwu |
Verschenen in: |
Journal of manufacturing processes |
Paginering: |
Jaargang 136 () nr. C pagina's 56-67 |
Jaar: |
2025 |
Inhoud: |
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Uitgever: |
The Society of Manufacturing Engineers |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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