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High-efficiency free-damage electrochemical shear-thickening polishing of single-crystal silicon carbide |
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Titel: |
High-efficiency free-damage electrochemical shear-thickening polishing of single-crystal silicon carbide |
Auteur: |
Shen, Mengmeng Wu, Lingwei Wei, Min Chen, Hongyu Yuan, Julong Lyu, Binghai Deng, Hui To, Suet Beri, Tufa Habtamu Hang, Wei |
Verschenen in: |
Journal of manufacturing processes |
Paginering: |
Jaargang 132 () nr. C pagina's 532-543 |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
The Society of Manufacturing Engineers |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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