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Study on the affecting factors of material removal mechanism and damage behavior of shear rheological polishing of single crystal silicon carbide |
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Titel: |
Study on the affecting factors of material removal mechanism and damage behavior of shear rheological polishing of single crystal silicon carbide |
Auteur: |
Chen, Hongyu Wu, Zhengchao Hong, Binbin Hang, Wei Zhang, Peng Cao, Xingzhong Xu, Qiu Chen, Pengqi Chen, Heng Yuan, Julong Lyu, Binghai Lin, Hua-Tay |
Verschenen in: |
Journal of manufacturing processes |
Paginering: |
Jaargang 112 () nr. C pagina's 225-237 |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
The Society of Manufacturing Engineers |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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