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Investigation of novel suppressor Nitrotetrazolium Blue chloride on cobalt superconformal growth |
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Titel: |
Investigation of novel suppressor Nitrotetrazolium Blue chloride on cobalt superconformal growth |
Auteur: |
Li, Yaqiang Ma, Xiaochuan Li, Chengzhi Li, Ruopeng Zhang, Jinqiu Yang, Peixia Liu, Xinyu Broekmann, Peter Wang, Bo Lv, Wenquan An, Maozhong |
Verschenen in: |
Journal of manufacturing processes |
Paginering: |
Jaargang 101 () nr. C pagina's 15-24 |
Jaar: |
2023 |
Inhoud: |
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Uitgever: |
The Society of Manufacturing Engineers |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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