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                                       Details for article 140 of 140 found articles
 
 
  XPS Analysis of SiC Films Prepared by Radio Frequency Plasma Sputtering
 
 
Title: XPS Analysis of SiC Films Prepared by Radio Frequency Plasma Sputtering
Author: Wang, Y.-Y.
Kusumoto, K.
Li, C.-J.
Appeared in: Physics procedia
Paging: Volume 32 (2012) nr. C pages 8 p.
Year: 2012
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 140 of 140 found articles
 
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