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Journal description
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Details for article 140 of 140 found articles
| Title: |
XPS Analysis of SiC Films Prepared by Radio Frequency Plasma Sputtering |
| Author: |
Wang, Y.-Y. Kusumoto, K. Li, C.-J. |
| Appeared in: |
Physics procedia |
| Paging: | Volume 32 (2012) nr. C pages 8 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 140 of 140 found articles
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