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Journal description
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Details for article 100 of 140 found articles
| Title: |
Research on Thin Film Thickness Uniformity for Deposition of Rectangular Planar Sputtering Target |
| Author: |
Zhang, Yichen Song, Qingzhu Sun, Zhulai |
| Appeared in: |
Physics procedia |
| Paging: | Volume 32 (2012) nr. C pages 11 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 100 of 140 found articles
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