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Details for article 15 of 51 found articles
| Title: |
Effects of the distance between the inductance coil and substrates on the microstructure and optical properties of silicon films deposited by ICP-CVD |
| Author: |
Wang, Jinxiao Qin, Yanli Yan, Hengqing Gao, Pingqi Li, Junshuai Yin, Min He, Deyan |
| Appeared in: |
Physics procedia |
| Paging: | Volume 18 (2011) nr. C pages 8 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 51 found articles
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