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Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization |
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Title: |
Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization |
Author: |
Sun, Seho Lee, Kangchun Lee, Ganggyu Kim, Yehwan Kim, Sungmin Hwang, Junha Kong, Hyungoo Chung, Kyung Yoon Ali, Ghulam Song, Taeseup Paik, Ungyu |
Appeared in: |
Journal of industrial and engineering chemistry |
Paging: |
Volume 111 () nr. C pages 219-225 |
Year: |
2022 |
Contents: |
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Publisher: |
The Korean Society of Industrial and Engineering Chemistry |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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