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                                       Details for article 23 of 51 found articles
 
 
  Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization
 
 
Title: Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization
Author: Sun, Seho
Lee, Kangchun
Lee, Ganggyu
Kim, Yehwan
Kim, Sungmin
Hwang, Junha
Kong, Hyungoo
Chung, Kyung Yoon
Ali, Ghulam
Song, Taeseup
Paik, Ungyu
Appeared in: Journal of industrial and engineering chemistry
Paging: Volume 111 () nr. C pages 219-225
Year: 2022
Contents:
Publisher: The Korean Society of Industrial and Engineering Chemistry
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 23 of 51 found articles
 
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