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                                       Details for article 48 of 56 found articles
 
 
  Simulation of slurry residence time during chemical-mechanical polishing using 3-D computational fluid dynamics
 
 
Title: Simulation of slurry residence time during chemical-mechanical polishing using 3-D computational fluid dynamics
Author: Lin, Kuang C.
Liao, Chuan-Chieh
Appeared in: Transactions of the Institution of Chemical Engineers. Part A, Chemical engineering research & design
Paging: Volume 191 () nr. C pages 375-386
Year: 2023
Contents:
Publisher: Institution of Chemical Engineers
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 48 of 56 found articles
 
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