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Journal description
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Details for article 27 of 51 found articles
| Title: |
Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition |
| Author: |
Ding, Yangyao Zhang, Yichi Orkoulas, Gerassimos Christofides, Panagiotis D. |
| Appeared in: |
Transactions of the Institution of Chemical Engineers. Part A, Chemical engineering research & design |
| Paging: | Volume 159 () nr. C pages 439-454 |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Institution of Chemical Engineers |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 27 of 51 found articles
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