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Journal description
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Details for article 13 of 29 found articles
| Title: |
Fabrication of 53.2 nm pitch self-traceable gratings by laser-focused atomic deposition combined with extreme ultraviolet interference lithography |
| Author: |
Tang, Zhaohui Zhao, Jun Deng, Xiao Tan, Wen Wu, Yanqing Tai, Renzhong Cheng, Xinbin Li, Tongbao |
| Appeared in: |
Optik |
| Paging: | Volume 279 () nr. C pages p. |
| Year: |
2023 |
| Contents: | |
| Publisher: |
Elsevier GmbH |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 29 found articles
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