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Journal description
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Details for article 86 of 178 found articles
| Title: |
Investigation of the formation mechanism of the fluorocarbon film in CF4 plasma processing of fused silica |
| Author: |
Jin, Huiliang Fan, Fei Yuan, Zhigang Li, Yaguo |
| Appeared in: |
Optik |
| Paging: | Volume 202 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 86 of 178 found articles
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