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Journal description
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Details for article 91 of 99 found articles
| Title: |
Surface modification and etch process optimization of fused silica during reaction CHF3–Ar plasma etching |
| Author: |
Sun, Laixi Jin, Huang Ye, Xin Liu, Hongjie Wang, Fengrui Jiang, Xiaodong Wu, Weidong Zheng, Wanguo |
| Appeared in: |
Optik |
| Paging: | Volume 127 (2016) nr. 1 pages 6 p. |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Elsevier GmbH |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 91 of 99 found articles
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