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Journal description
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Details for article 16 of 22 found articles
| Title: |
Single closed fringe pattern phase demodulation in alignment of nanolithography |
| Author: |
Xu, Feng Hu, Song Yang, Yong Li, Jinlong Li, Lanlan |
| Appeared in: |
Optik |
| Paging: | Volume 124 (2013) nr. 9 pages 6 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier GmbH |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 16 of 22 found articles
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