|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 2 of 10 found articles
| Title: |
A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering |
| Author: |
Tay, Cho Jui Quan, Chenggen |
| Appeared in: |
Optik |
| Paging: | Volume 114 (2003) nr. 1 pages 6 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Urban & Fischer Verlag |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 10 found articles
| << previous | next >> |