|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 4 of 7 found articles
| Title: |
Monte Carlo study of backscattered electron signals from microstructures of x-ray masks |
| Author: |
Yasuda, Masaaki Fujii, Kuniko Kawata, Hiroaki Murata, Kenji |
| Appeared in: |
Optik |
| Paging: | Volume 112 (2001) nr. 8 pages 8 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Urban & Fischer Verlag |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 7 found articles
| << previous | next >> |