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                                       Details for article 11 of 22 found articles
 
 
  ILT Approach for Compensating 3-D Mask Effects
 
 
Title: ILT Approach for Compensating 3-D Mask Effects
Author: Xiong, Wei
Zhang, Jinyu
Tsai, Min-Chun
Wang, Yan
Yu, Zhiping
Appeared in: Tsinghua science and technology
Paging: Volume 14 (2009) nr. 1 pages 7 p.
Year: 2009
Contents:
Publisher: Tsinghua University Press
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 11 of 22 found articles
 
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