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Details van artikel 3 van 11 gevonden artikelen
| Titel: |
Design Theory for a Laminar Flow-Type Clean Room and Image Processing on Remotely Detected Particulates |
| Auteur: |
Hayakawa, Ichiya Fujii, Shuji Kim, Kwang Young |
| Verschenen in: |
Aerosol science and technology |
| Paginering: | Jaargang 7 (1987) nr. 1 pagina's 47-56 |
| Jaar: |
1987 |
| Inhoud: |
Clean room technology is growing and is being applied rapidly in various fields such as the electronic industry, semiconductor industry, pharmaceutical industry, etc. This paper initially presents an outline of activities and recent studies in Japan. Clean room research is independently conducted in universities, research laboratories, research institutions, etc. Subsequently, the paper presents a design concept for laminar flow-type clean rooms. In the design of clean rooms, since sufficient theoretical approaches and analyses were not available, U.S. Federal Standard 209B was generally applied. Particle concentration and diameter are the main components by which a clean room is evaluated. This paper reports the importance of a third component: the number of particles reaching an object. Finally, the paper describes the remote detection of particles in clean rooms. Particulate scattered light of a He-Ne laser is remotely detected by using an optical system, a video system, and an image processing system. This paper presents an outline of this system and gives examples of measuring behavior and adhesion. |
| Uitgever: |
Taylor & Francis |
| Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
Details van artikel 3 van 11 gevonden artikelen
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