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| Titel: |
Optical Detection of Particle Contamination on Surfaces: A Review |
| Auteur: |
Lilienfeld, Pedro |
| Verschenen in: |
Aerosol science and technology |
| Paginering: | Jaargang 5 (1986) nr. 2 pagina's 145-165 |
| Jaar: |
1986 |
| Inhoud: |
This paper reviews the application of light scattering to the detection and measurement of discrete contaminating particles on smooth surfaces. The optical properties of specular and diffuse reflecting surfaces, and those of isolated particles are summarized, followed by the behavior of surface-deposited particles. A discussion is presented on the parameters influencing the detectability of particles on surfaces, and the principal design criteria of light scattering inspection systems. Emphasis is placed on laser scanning systems which, at present, predominate as a versatile means of automated surface contamination detection. Both laser scanning and video inspection systems are discussed, and examples are presented of typical commercially available instruments incorporating these techniques. |
| Uitgever: |
Taylor & Francis |
| Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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