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Assessment of techniques for characterizing the surface quality of ground silicon nitride |
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Title: |
Assessment of techniques for characterizing the surface quality of ground silicon nitride |
Author: |
Zanoria, E. S. Watkins, T. R. Breder, K. Riester, L. Bashkansky, M. Reintjes, J. Sun, J. G. Ellingson, W. A. Blau, P. J. |
Appeared in: |
Journal of materials engineering and performance |
Paging: |
Volume 7 (1998) nr. 4 pages 533-547 |
Year: |
1998 |
Contents: |
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Publisher: |
Springer-Verlag, New York |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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