Effect of the Variation of Film Thickness on the Properties of Multilayered Si-Doped Diamond-Like Carbon Films Deposited on SUS 304, Al and Cu Substrates
Titel:
Effect of the Variation of Film Thickness on the Properties of Multilayered Si-Doped Diamond-Like Carbon Films Deposited on SUS 304, Al and Cu Substrates
Auteur:
Li, An Chen, Qingchun Wu, Guizhi Huang, Xin Wang, Yunfeng Lu, Zhibin Zhang, Guangan Nie, Xiangfan