Structural and Mechanical Properties of Zr-Si-N Coatings Deposited by Arc Evaporation at Different Substrate Bias Voltages
Titel:
Structural and Mechanical Properties of Zr-Si-N Coatings Deposited by Arc Evaporation at Different Substrate Bias Voltages
Auteur:
Warcholinski, B. Kuznetsova, T. A. Gilewicz, A. Zubar, T. I. Lapitskaya, V. A. Chizhik, S. A. Komarov, A. I. Komarova, V. I. Kuprin, A. S. Ovcharenko, V. D. Goltvyanytsya, V. S.